| 摘要 |
Target cathode for depositing a composite material on a substrate 7 by spraying, the said material being made up of a constituent A and a constituent B, the cathode being characterised in that it comprises at least two elementary targets 1, 3, 5 for constituent A by itself, denoted A targets, at least two elementary targets 2, 4, 6 for the constituent B by itself, denoted B targets, these elementary A and B targets being narrow and elongate and arranged side by side in an alternate manner, the set of the elementary A targets and the set of the elementary B targets being supplied with electricity separately from each other, a metal screen 8 to 13 separating the elementary targets individually from each other and also externally surrounding the target cathode assembly, the length of an elementary target being at least equal to the extent of the said substrate, taken in a direction parallel to the length direction of an elementary target. <IMAGE>
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