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发明名称
SUBSTRATE CLEANER
摘要
申请公布号
JPS61105892(A)
申请公布日期
1986.05.23
申请号
JP19840228133
申请日期
1984.10.30
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
HARA KENJI;ARISUE KAZUO;SASAKI SHUNSUKE
分类号
H05K3/26;C23G3/00
主分类号
H05K3/26
代理机构
代理人
主权项
地址
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