| 摘要 |
PURPOSE:To correct a position of a tool, etc., and to execute a profile control to an object curved surface by estimating an error contained in a model from an object curved surface-shaped model which has been stored, and a position of an actual surface which is measured every moment. CONSTITUTION:An X axis servo-system 100 derives a deviation by comparing a target value Xr, and a controlled variable X detected by an X axis detector 103 by a comparison operating part 104, and a Y axis servo-system 110 also derives a deviation by comparing a target value Yr, and a controlled variable Y detected by a Y axis detector 113 by a comparison operating part 114, by the same constitution. A difference of a surface position Ya corresponding to an X axis determined in accordance with a surface shape 130, and a Y axis position Y, namely, a relative distance -d of a terminal and the surface is detected by a distance sensor 122 of the terminal. This relative distance -d is compared with a target relative distance -dr, and this deviation is given as a target value of the Y axis servo-system 110 through a profile operation control processing 121. When a compensating signal (ya) coincides with an estimated value, it is shown that a disturbance input to a profile control system is cancelled, and a curved surface profile control can be executed with a high accuracy and at a high speed. |
