| 摘要 |
PURPOSE:To perform the inspection of foreign matter with high sensitivity without deteriorating high velocity capacity, by simultaneously applying parallel processing to the output signals from a plurality of photoelectric converting solid image pick-up elements. CONSTITUTION:Outputs of picture elements i-n are simultaneously binarized in parallel by a binarization circuit 21 and a binary signal '1' is guided to an OR circuit 22 and, when foreign matter is detected in at least one picture element, the output of the OR circuit 22 comes to '1' to be inputted to foreign matter memory 23. By this method, outputs of 40 picture elements are simultaneously subjected to parallel processing and the enhancement of an inspection speed and detection sensitivity is attained to a large extent as compared with a case using a self-scanning type image pick-up element. |
