| 摘要 |
PURPOSE:To accurately and efficiently measure the behavior of dust in a clean space, by projecting laser beam to a measuring surface in a read screen form and receiving the reflected beam from dust to convert the same to an image signal while performing various measuring processings on the basis of said signal. CONSTITUTION:The projection of laser beam along beam paths 17a, 17b... is repeatedly performed only for a definite time and the image signal, which is outputted from an industrial television camera 21 and shows the image on a measuring surface 16, is outputted to an analogue/digital converter 30 through a camera controller 21a to be stored in a video memory part 31. An operation control part 5 performs various measuring processings on the basis of the image data of the video memory part 31 and the result thereof is displayed on a display part 6. |
