| 摘要 |
PURPOSE:To obtain the titled sputtering gun wherein high electric power can be charged by putting metallic cotton obtained by collecting thin wires of a metal or an alloy between a target and a cooled plate electrode, removing rapidly the heat generated in the target, and preventing an adverse effect on the coated substrate. CONSTITUTION:A thin film 5 of metallic cotton obtained by collecting thin wires of a metal or an alloy is put between a cooled plate electrode 1 wherein cooling water is passed and a target 2, a fitting screw 3 is screwed into a tapped hole 3' of the cooled plate electrode 1, and the cotton is firmly pressed. The sputtering gun of a sputtering device is thus obtained. By such constitution, the thin layer 5 of metallic cotton of an copper and nickel alloy which is a good conductor of heat can be easily deformed in accordance with the ruggedness of the pressing surface of the cooled plate electrode 1 and the target 2, and both electrode and target are thermally connected. Accordingly, the heat generated in the target 2 during sputtering can be efficiently transmitted to the cooling water. |
