| 摘要 |
PURPOSE:To prevent a dew drop, a thermal distortion, etc. to optical parts by measuring a machine body temperature of a laser beam machine, and cooling the optical parts based on a result of the measurement. CONSTITUTION:A temperature control device 19 measures a surface temperature of a dust-proof tube 16 and a column 5 by temperature sensors 21, 22 and derives its mean value as a machine body temperature of a laser beaming machine. Based on its mean value, an adjustment is executed so that a temperature of a cooling water 31 supplied from a cooling water pump 27 coincides with the mean value. The cooling water 31 absorbs heat of reflection mirrors 11, 12, 13 and 14, and a condensing lens by a coolant jacket 25, and as for the cooling water itself, its temperature rises, and it returns to the cooling water pump 27 through a pipe 26. Also, it is fed out again to each coolant jacket 25 through the temperature control device 19 by the cooling water pump 27. |
