| 摘要 |
PURPOSE:To obtain a photo magnetic recording medium for which a thin amorphous magnetic alloy film having a large Kerr rotating angle is used as a recording medium by forming a magnetic alloy having the axis of easy magnetization in the direction perpendicular to the film plane and contg. a rare earth element, ferrous transition metal, Ag and N as a recording layer. CONSTITUTION:A high-frequency sputtering device is used for the manufacture of the film and a composite target dispersed and disposed with Tb chips and Ag chips on an Fe plate is used for the target. The compsn. is adjusted to attain Tb36Fe64-xAgx by area ratio to the target and pure argon and a gaseous mixture composed of argon and nitrogen is used as the gaseous atmosphere. The compsn. of the film manufactured in the pure argon atmosphere with the target compsn. of x=0 is 30at% Tb and Tb rich with respect to the compensation compsn. according to XMA. The sputtering conditions are summed up to the target: Tb36Fe64-xAgx, a substrate: glass, back pressure: <=2X10<-7>Torr, gaseous atmosphere pressure: 2X10<-2>Torr, sputtering power: 2W/cm<2>, inter- electrode distance: 5cm. |
