| 摘要 |
PURPOSE:To decrease the mismatching of contact resistances of a plurality of metallic thin film resistors and a wiring metal, by providing wiring metallic contact parts to a plurality of the metallic thin film resistors, which are built in a semiconductor substrate, at the tip parts of comb shaped branched parts from a main wiring part, and making all the shapes and the areas equal. CONSTITUTION:Metallic thin film resistors 35-38 having the same shape and area are arranged as shown in the Figure. A wiring metal 7 on the common connecting side has a comb shaped branched structure from a main wiring part. At the branched part, the shape and the area of the contact part of each resistor and the wiring metal 7 is made equal. Namely, the contact parts of the resistors and the wiring metal are formed independently from a common wiring. Thus the potential distribution of each of the metallic thin film resistors 35-38 and the wiring metal 7 becomes equal without effect of the shape of the common wiring part. The contact resistances become all equal. Thus the metallic thin film resistors having excellent alignging property as a whole can be realized. |
