| 摘要 |
PURPOSE:To simplify pump equipment by introducing the outside air in a bearing clearance between a guide shaft and a support, and keeping the interior of the gap below atmospheric pressure by suction of a vacuum pump to operate a bearing. CONSTITUTION:When the pressure in a groove 9 is reduced below the atmospheric pressure through an air path 10 by a vacuum pump13, the outside air flows into a bearing gap 7 through an air path 3, so that the gas lubrication is performed between the outer surface 6 of a guide shaft 1 and the inner surface 8 of a slider 2. Thus, the pressure in the bearing clearance 7 is kept below the atmospheric pressure, so that working gas is prevented from leaking out to the outside of a bearing, and the operation of the bearing is performed only by a vacuum pump device 11. |
