发明名称 SINGLE CRYSTAL
摘要 A single crystal of IIIb-Vb group compound contains 1 x 10<17> SIMILAR 8 x 10<19> cm <3> of oxygen and has a dislocation density which is low and uniform in a direction perpendicular to the growth direction. An LEC method for crystal growth of a single crystal of GaAs comprises an addition of oxide at an oxygen concentration of 1 x 10<17> SIMILAR 2 x 10<21> cm <3>.
申请公布号 GB8609480(D0) 申请公布日期 1986.05.21
申请号 GB19860009480 申请日期 1986.04.18
申请人 MITSUBISHI MONSANTO CHEM;MITSUBISHI CHEM IND 发明人
分类号 C30B27/02;C30B15/00;C30B29/42;H01L21/18;H01L21/208 主分类号 C30B27/02
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