| 摘要 |
PURPOSE:To obtain easily a high-frequency or high-density probe by using a monocrystal boric lithium-Li2B4O7 for a piezoelectric material and forming it by acid etching. CONSTITUTION:A Z-plate (a plate of which Z-axis is vertical to surface) is cut off from a monocrystal boric lithium in a manner that X-axis and Y-axis coincide with edges of the plate. The plate is polished,then, after vapor depositing a ground electrode on the whole surface of one side of the plate, it is adhered to a packing material. Next, a rectangular film electrode array 13 is formed on the crystal plate by means of mask deposition. On side surface of the plate 12, abietic grease is applied. After a bonded body comprising the monocrystal plate 12 and the packing material 11 is immersed in a nitric acid solution, it is washed and dried. In result, each electrode part is almost completely separated from adjacent parts. |
