| 摘要 |
A pattern position detecting apparatus has an ITV camera for receiving the image of a pattern of the IC chip and a memory for storing therein the image signal from the ITV camera as a pattern data. When the pattern data is read out from the memory, a pattern section is shifted every second picture-element array in the horizontal and vertical directions and the picture elements are picked up every second picture element from the pattern section. The pattern data corresponding to the pattern sections read out from the memory are compared with reference pattern data, whereby determination is made of the degree of coincidence between both of the patterns. After determination has been made of the degrees of coincidence with respect to the whole pattern, detection is made of the position of the pattern section having the highest degree of coincidence among said degrees of coincidence in accordance with the address of the memory. |
