| 摘要 |
PURPOSE:To position two wafers easily by determining the direction of the orientation flat of one wafer and crossing the orientation flat of the other wafer at right angles by using a reference member when two wafers to which the rectilinear orientation flats are formed are positioned so that flats mutually cross at right angles. CONSTITUTION:One wafer W to which an orientation flat F is shaped is conformed at the center 0 of revolution of a turntable 1 and placed first,and the direction of the flat F is made to agree with an x axis or a y axis by employing either of photoelectric sensors 2a, 2b arranged near the wafer W. A holder 4 as another turntable is driven by using a guide 3 connected to the table 1 and a sliding arm 6, and the flat of another wafer placed on the holder 4 is crossed at right angles with said flat F. Accordingly, orthogonal two notches are shaped around the holder 4, and rollers 10 and 11 as reference members are each disposed to the notches, thus determining the position of the flat of the wafer by these rollers. |
