| 发明名称 |
CATHODE WITH IMPROVED GLOW DISCHARGE ACCUMULATOR |
| 摘要 |
An improved cathode assembly specifically designed to provide for the uniform, localized profiling of dopant or other alterant elements into the host matrix of a semiconductor alloy material which is continuously and uniformly deposited onto a moving substrate by a glow discharge deposition process. |
| 申请公布号 |
JPS61102031(A) |
申请公布日期 |
1986.05.20 |
| 申请号 |
JP19850238537 |
申请日期 |
1985.10.24 |
| 申请人 |
SOUBONIKUSU SOLAR SYST |
发明人 |
JIYOACHIMU DOEERAA;MASATSUGU IZU |
| 分类号 |
H01L31/04;C23C16/04;C23C16/54;H01J37/32;H01L21/205 |
主分类号 |
H01L31/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
