| 摘要 |
PURPOSE:To detect the vacuum pressure area of a chamber section by a method wherein the pressure of the vacuum chamber is decided by a pressure detecting gauge, provided at the force stage of a molecular pump, when a valve is opened and the revolving number of the pump has arrived at a predetermined number of revolution. CONSTITUTION:The main valve V2 is provided between a preliminary chamber 1 and a high vacuum chamber 2 and the main valve V1 is provided between the preliminary chamber 1 and the axial flow molecular pump 4 while the pressure detecting gauge VG is provided in the fore stage of the pump 4. The pressure in the vacuum chamber is decided when the valve V1 is opened and the revolving number of the pump 4 has arrived at a predetermined value. According to this method, the pressure area of medium vacuum may be detected, enough space may be obtained and the vacuum chamber may be evacuated to a high vacuum.
|
