| 摘要 |
PURPOSE:To enhance the measuring accuracy of the inner diameter of a piercing hole, by relatively moving an image sensor and an object to be measured by a minute distance to a dimension measuring direction and storing the output of a light receiving element, whose luminosity shows the intermediate value between a max. value and a min. value, at every minute movement distance to apply statistical processing thereto. CONSTITUTION:At the measuring time of a dimension, an object 4 to be measured having a piercing hole 4a provided thereto by drilling is attached to the measuring hole 3a of a jig 3 and the light from a light emitting element 2h is projected toward the hole 4a and the reflected light therefrom is received by an image sensor 5 having light receiving elements 5a provided thereto in parallel. At this time, an X-Y table 8 is moved by a minute distance to a dimension measuring direction and the measured value from the light receiving element 5a, wherein the reflected light from the boundary part of the hole 4a and lower surface 4b of the object 4 to be measured shows an intermediate value between a max. value and a min value, is successively stored in an operation circuit 30. Thus obtained measured values are subjected to statistical processing and the actual dimension of the object 4 to be measured is calculated by displaying the same by the position and luminosity of the image sensor 5. |
