| 摘要 |
PURPOSE:To measure the depth of a fine deep groove by irradiating two parallel surfaces and a groove which has planes crossing said two planes at right angles with parallel luminous flux, and measuring the quantity of reflected light which travels from the groove in the opposite direction of the incident light. CONSTITUTION:Light sent through an optical fiber 13 is converted by a lens 15 into a parallel light beam, which is transmitted through a translucent mirror prism to illuminate a sample which has the groove whose depth is to be measured. A light transmitting and photodetecting head 14 receives the reflected light which travels in the opposite direction of the incident light and this reflected light is reflected by the translucent mirror prism and converted by a photoelectric converting element 18 into an electric signal. Then, a slider 21 fitted to the light transmitting and photodetecting head 14 moves along an arcuate graduated arm 22 to read the angle of incidence of the light illuminating the sample 17 on the scale, and the angle thetaR of incidence of the light at this time and the width (a) of the opening part of the groove which are measured through a microscope, etc., are substituted in an equation to measure the depth of the fine deep groove. |
