| 摘要 |
PURPOSE:To measure the size of a fine pattern with high precision by scanning an electron beam on a sample to be measured and outputting an image signal showing the pattern, and also providing a display part and displaying an image of the pattern on the display part. CONSTITUTION:This size measuring instrument scans the electron beam on the sample to be measured to output the image signal IS showing the pattern P, and also has an image signal amplifier 15 which displays an image on a CRT (Cathode-Ray Tube) 14 with the image signal IS outputted from an amplification part 13 and a sweep signal outputted from a sweep signal generation part 7 and the CRT14 on which an enlarged image of as a specific part is displayed. Then, this size measuring device is equipped with a size measuring part 2 which measures the size of the specific part automatically on the basis of the image signal outputted from a scanning type electron microscope (SEM) main body part 1. Therefore, variance among observers and a read error are eliminated and the size of a fine pattern is measured with high precision. |
