| 摘要 |
PURPOSE:To enable the detection of the shape about an object at a narrow place such as a valley, by moving a detection head to scan spots of illumination light thereover. CONSTITUTION:This apparatus is made up of a focusing optical system 11, a light source of illumination light, a photoelectric converter, a microscopic detection optical system (a microscopic prism 13 and a microscopic mirror), an image forming optical system 13 and a detection head 16 holding all thereof and a work table 6 for holding an object. Then, a processor 33 controls a table driver 32 to move the table 6 so that a welding part 7 of a flat back part 2 of an object to be inspected is positioned as specified with respect to the head 16. Then, a detection head driving section 30 is controlled to move the head 16 in the direction of X by the length in a detection range. Then, positional information in the direction X and Z of the spot of the welding part 7 is taken in from a light cutting line extraction circuit 31 to obtain a line cutting sectional shape. A unit 33 judges whether the welding part 7 of the part 2 of the object being inspected in rejected from the resulting shape. |
