| 摘要 |
PURPOSE:To contrive to improve the reliability by preventing the deterioration in element characteristics by a method wherein an electrode is formed by a coat of Ti layer on a semiconductor contact layer, next a coat or more of Pt layer and Ti layer in this order, and successive coats of Pt layer and Au layer thereon. CONSTITUTION:As the p-electrode, using electron beam deposition, the contact layer 6 is coated first with a Ti layer 7 and next with Ti-layers/Pt-layers by five-time repetition in this order, resulting in the formation of an intermediate multilayer structure 11; finally, it is coated with a Pt-layer 8, which is then coated with an Au layer 9 by a normal electrolytic plating. Thereafter, heat treatment is carried out to take ohmic contact between the contact layer 6 and the Ti layer 7. Next, after adhesion of an Au-Ge-Ni layer 10 as the n- electrode, ohmic contact is taken by forming an alloy layer on heat treatment. Then, the resonator is formed by cleavage in the direction parallel with the drawing. |
