| 摘要 |
PURPOSE:To obtain a high sensitivity, by removing a part of a base of an infrared linear array element facing a light receiving section, leaving only a meshy support bridge to eliminate the escape of heat to the base while yielding a high mechanical strength. CONSTITUTION:An electrode 2 about 0.2mum thick is formed on a MgO base 1 about 400mum thick which mirror-ground with a cleavage of (100) and a pyroelectric film 3 about 4mum thick is made by sputtering. After the evaporation of a light receiving electrode 4 and a fetch electrode 5, the MgO base 1 is etched using heated concentrated phosphoric acid to form an opening 6. In this process, the whole part of the MgO base 1 corresponding to the opening 6 is not removed completely but a part of the MgO base 1 is left meshy as a support bridge 7 so that a thin film electrode 2 facing the opening 6 will be supported to hold the thin film electrode 2. Thus, the element can have a sufficient mechanical strength along with a sufficient infrared sensitivity. |
