| 摘要 |
<p>PURPOSE:To improve process precision and operation efficiency, by a method in which, after a vessel is arranged in a sealed chamber and the vessel inside and the chamber inside are exhausted simultaneously, the communication therebetween is interrupted, process gas is introduced into the vessel while introducing gas into the sealed chamber, and the the vessel is taken out into atmosphere to be irradiated by laser light. CONSTITUTION:After a vessel 14 is mounted in a gas exchanging structure and the chamber 20 inside and the vessel 14 inside are exhausted, process gas is supplied from a supplying apparatus 29 into the vessel 14 and buffer gas is supplied from a supplying apparatus 31 into the chamber 20 so as to cause the approximately same pressure as that in the chamber 20. Next, buffer gas is introduced into the vessel 14 from the buffer gas supplying apparatus to make the pressure in the vessel a predetermined value. Focusing laser light onto a repair section through a lens 38 from a laser right source 39 can produce photo chemical reaction of the laser light and the process gas to heat-decompose the process gas, and can form a film on the metal element which existed in the process gas, on laser focusing sections positioned on a mask. Thus thickness of the glass window can be made thin, spot diameter of the laser light lying on a member to be processed can be reduced to about several microns, and process precision can be improved.</p> |
