| 摘要 |
PURPOSE:To reduce an external noise and to perform a low crosstalk by forming a magnetic shielding layer through an insulating film around wirings for transmitting a high speed signal, shielding the magnetic flux generated at the adjacent wirings, and eliminating the external leakage of a magnetic flux generated by the own wirings. CONSTITUTION:A ground plane 2 made of an Nb film is formed on an insulating substrate 1, a ground plane insulating film 3 made of an SiO film is formed, and an SiO film of desired region is then removes to form an SiO groove 4. Then, a magnetic shielding layer 5 made of the Nb film is coated on the entire surface of the groove of the SiO, and extended partly of the surface of the SiO film. Then, part of the layer 5 remains to form an insulating layer 6 made of the SiO film, and a Pb alloy is deposited on the top of the groove. After a pattern 7 for a desired signal line is formed in the groove, a signal line insulating film 8 is formed. The groove 4 is buried by the SiO, and a magnetic shielding layer 9 made of the Nb film is formed to coat the entire surface of the groove. |
