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发明名称
HALBLEITEREINRICHTUNG
摘要
申请公布号
DE3539208(A1)
申请公布日期
1986.05.15
申请号
DE19853539208
申请日期
1985.11.05
申请人
SONY CORP.
发明人
UEKI,YOSHIO
分类号
H01L21/8222;H01L21/8224;H01L21/8228;H01L27/082;(IPC1-7):H01L27/04
主分类号
H01L21/8222
代理机构
代理人
主权项
地址
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