摘要 |
PURPOSE:To produce a low-cost multichannel-type detector the cross sectional shape of which can be freely adjusted by making many penetrating holes having a desired cross sectional shape formed by molding have a secondary electron emission characteristic and forming conductive films on the incidence-side and the discharge-side surfaces of the perforated body. CONSTITUTION:After many penetrating holes 4 are formed in a ceramic base 2 containing a secondary-electron-emitting substance such as zinc titanate by molding, the thus prepared perforated body is sintered. Thin conductive electrode films 6 and 8 are formed on the upper and the lower surfaces of the perforated body, for example, by applying a silver paste. While applying given electric potentials to the electrodes 6 and 8, a collector electrode 10 and grides 12 and 14, charged particles 16 are made somewhat obliquely incident upon the holes 4. The particles 16 are duplicated by the potential difference between the electrodes 6 and 8 located around both ends of each hole 4 and then discharged from the discharge holes prior to being collected by the collector electrode 10. |