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发明名称
VERFAHREN ZUM HERSTELLEN EINER ISOLIERSCHICHT ZWISCHEN METALLISIERUNGSEBENEN VON INTEGRIERTEN HALBLEITERSCHALTUNGEN.
摘要
申请公布号
AT19712(T)
申请公布日期
1986.05.15
申请号
AT19830106743T
申请日期
1983.07.08
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
EGGERS, HARALD, DIPL.-ING.
分类号
H01L21/314;H01L23/52;(IPC1-7):H01L21/90
主分类号
H01L21/314
代理机构
代理人
主权项
地址
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