| 摘要 |
PURPOSE:To obtain a manufacturing method of a membrane in which the hydrophilic nature is increased and the separation performance of oxygen and nitrogen is improved by performing the plasma copolymerization of perfluoro compds. in the copresence of ammonia. CONSTITUTION:A thin membrane is formed on a molded body of base body by performing the plasma polymerization of a monomer of perfluorocompds. in the copresence of ammonia. Aliphatic compds., aromatic monocyclic compds. and alicyclic compds. are used as the perfluorocompds. These are used in the range of (100:1)-(1:10) proportion mixing with ammonia. The flow velosity of the monomer is regulated to about 0.01-5cm<3> (STP)/minute in a plasma polymerization apparatus of 25 W electric power and the time is decided so that 0.01-10mum membrane thickness is obtained. |
