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发明名称
MANUFACTURE OF SILICON NITRIDE HAVING HIGH ALPHA-PHASE CONTENT
摘要
申请公布号
JPS6197110(A)
申请公布日期
1986.05.15
申请号
JP19840220187
申请日期
1984.10.18
申请人
OSAKA TITANIUM SEIZO KK
发明人
NAKAYAMA EIICHI;NODA TOSHIO
分类号
C01B21/068
主分类号
C01B21/068
代理机构
代理人
主权项
地址
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