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发明名称
摘要
申请公布号
JPS6118736(B2)
申请公布日期
1986.05.14
申请号
JP19770011323
申请日期
1977.02.04
申请人
ASAHI CHEMICAL IND
发明人
ABE YASUKI;KATO MICHIO
分类号
C08F2/00;C08F2/48;C08F2/50;C08F8/00;C08F8/14;C08F8/44;C08F299/00;G03F7/004;H01L21/027;H01L21/312
主分类号
C08F2/00
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代理人
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