| 摘要 |
PURPOSE:To enable highly accurate positioning as much as possible without losing dynamic rigidity of a guide face b supplying pressure fluid into the space between sliding faces and making the contact face pressure small in the condition where the sliding faces are contacted. CONSTITUTION:A value obtained by multiplying input current of a feed motor by marks of positive and negative of the feeding direction is integrated for a predetermined time to detect sliding resistance between sliding faces of a base rack matter 11 and a moving body 10. And pressure fluid is supplied to the space between the sliding faces of the base rack matter 11 and the moving body 10 in correspondence with the detected result. Here, the flow amount of pressure fluid is adjusted according to the sliding resistance between the sliding faces, and the contact face pressure is made small in the condition where the sliding faces are contacted. The pressure fluid is supplied from an air pressure source 14 and regulated to a predetermined pressure by a regulator 15, and supplied to pockets 30, 31 of sliding unit through air supply holes 101, 102 drilled on the moving body 10. A portion of the fluid is flowed out into the air through a pocket 32 and an exhaust hole 103. |
