| 摘要 |
PURPOSE:To allow a turbine to be manufactured without need of strict air-tight structure by rotating a spin head for rotating matters to be dealt with by use of the turbine driven by compressed nitrogen gas. CONSTITUTION:After a wafer 3 for which exposure has been completed is made to position on a spin head 2, a lid 4 is closed and a cavity 17 is sucked by a suction pipe 18 to press and fix the wafer 3 to the spin head 2. Then, compressed nitrogen gas is supplied into a turbine casing 9 through a valve 13 to rotate a turbine impeller 10 and the spin head 2 via a shaft 7. Next, a developer liquid is sprayed onto the wafer 3 from a spray nozzle 5 and a chamber 1 for developing is evacuated through an evacuation pipe 6. A fixed part of a photoresist on the wafer 3 is solved by the developer liquid and removed. This allows the turbine to be miniaturized, without danger of flash ignition even in the inflammable atmosphere and need of application of strict air-tight structure to the turbine. |
