| 摘要 |
PURPOSE:To selectively convey an article reliably and automatically in the above device for a process of manufacturing a semiconductor device by turning a rotary disc having entering and delivering means in a designated degree arc to enter and deliver the article. CONSTITUTION:An assembly A is transferred from transport means 124a to endless belts 88a-88d of an article transport direction select device 20. The endless belts 88a-88d are driven of an arrow 126 to move the assembly A until article detection means 108 is operated. Secondly, according to a signal of detection means 8, the assembly is regulated in position, with the leading edge brought into contact with a regulating pin 118 of entry position regulating means 110, and then the belts 88a-88b are stopped. Subsequently, a rotary disc 32 is turned in designated direction in a designated degree arc. If the assembly is conveyed to conveying means 124c without reversing the leading and trailing edges, the rotary disc is turned counter-clockwise in a 90 deg. arc and the belts 88a-88d are driven. Thus, the transport direction can be automatically selected. |
