| 发明名称 |
Method for measuring current at a p-n junction |
| 摘要 |
A method of mapping the current distribution of a p-n junction is described. The method uses measurements of the electron beam induced current.
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| 申请公布号 |
US4588946(A) |
申请公布日期 |
1986.05.13 |
| 申请号 |
US19830567349 |
申请日期 |
1983.12.30 |
| 申请人 |
AT&T BELL LABORATORIES |
发明人 |
LIN, PAUL S. |
| 分类号 |
G01R31/265;(IPC1-7):G01R31/26;G01R19/08 |
主分类号 |
G01R31/265 |
| 代理机构 |
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| 主权项 |
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