发明名称 Test system for VLSI digital circuit and method of testing
摘要 The conductive state of a transistor in a semiconductor integrated circuit is determined by irradiating the transistor with a radiation beam and measuring changes in load current, thereby indicating whether the transistor was conducting or non-conducting prior to irradiation. A correlated double sampling method is employed in measuring changes in load current. A load resistor in series with the device under test is capacitively coupled to a differential amplification means including a plurality of differential amplifiers with buffers connected between successive amplifiers. A system clock is stopped at a predetermined time period prior to irradiating the transistor. A bypass switch shunts the load resistor until the clock is stopped.
申请公布号 US4588950(A) 申请公布日期 1986.05.13
申请号 US19830552089 申请日期 1983.11.15
申请人 DATA PROBE CORPORATION 发明人 HENLEY, FRANCOIS J.
分类号 G01R31/26;G01R31/308;H01L21/66;(IPC1-7):G01R31/28 主分类号 G01R31/26
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