摘要 |
PURPOSE:To prevent the formation of a void between a plastic substrate and a substrate electrode and to make the heat-transfer effect uniform by interposing an elastic body having softness between the plastic substrate and the substrate, and fixing the plastic substrate to the substrate electrode. CONSTITUTION:An elastic body 3 having softness is interposed between a plastic substrate 1 and a substrate electrode 24 to fix the plastic substrate 1 to the substrate electrode 24. Low-density polyethylene, polypropylene, silicone rubber, or an elastomer are preferably used as the material for the elastic body 3 having softness. Althrough the thickness of the elastic body 3 depends on the ruggedness of the substrate electrode 24, the thickness is regulated to a value larger than the depth of the ruggedness of the substrate electrode 24, and adjusted to <=about 300mu, preferably to <=100mu. Since the ruggedness of the substrate electrode is adsorbed by the elastic body and the plastic substrate is tightly attached to the substrate electrode, the heat is transferred to the plastic substrate, and the generation of creases and cracks on the electrically conductive thin film, etc. due to strains by stress can be prevented. |