| 摘要 |
PURPOSE:To improve the operating performance by varying the condition of focusing to carry out regeneration of a plurality of times, and selecting the desired regeneration of it to obtain the final picture when recording and regenerating an electron microscope image by the use of a storage type phosphor sheet etc. CONSTITUTION:A storage type phosphor sheet 10 as a two-dimensional sensor is movably provided by means of roller 101, 102 under the mirror body of an electron microscope 1. And the enlarged scattering image 8b of a specimen 8 is stored and recorded on the sheet 10, and a laser beam 11a is irradiated on the sheet 10, and the luminous light with brightness is converted into an electrical signal by means of a photoelectric converter 15 to regenerate it on a recording device 18 through a picture processing circuit 16. At this time, the condition of focusing is varied to display pictures on a recording device 18 in a plurality of times, and the desired picture of them is selected and set b y means of a knob 30, and the operation of the device is carried out to obtain the final output picture. Accordingly, it is possible to improve the operating performance and to reduce the volume of an electron beam to be irradiated for focusing to the specimen. |
