| 摘要 |
PURPOSE:To set arbitrarily treating time in pair vessels, by actuating main arms and respective vessel arms independently. CONSTITUTION:Main arms 24A, 24B for carrying substrate cassettes 21 between chemical liquid vessels 23A, and respective vessel arms 25A, 25B which can move in one chemical liquid vessel 23A and can move between it and the neighbouring water-washing vessel 23B, are provided. The arms 25A, 25B which received one cassette 21 from the arms 24A, 24B, immerse it in one chemical liquid vessel 23A. After the cassette 21 has been immersed therein for a predetermined time, it is immersed and washed in the water-washing vessel 23B by the arms 25A, 25B. In a series of such chemical liquid processes, conditions can be set independently. Thus, the treating time in the pair vessels can be arbitrarily set. |
