| 摘要 |
PURPOSE:To improve the insulating properties of a gas laser by a method wherein the resonator part is also housed in a chamber in a dustproof structure separatedly from the constituent parts other than the resonator part using a partition wall, and at the same time, open parts for heat radiating are provided at least more than two places in number on the outer case of the upper part of the resonator and a filter is disposed in the open parts. CONSTITUTION:The case body structure is formed into a constitution having constituent parts 1 other than the resonator part of the CO2 laser oscillator, main flanges 2 for resonator holding, DC high-voltage charging parts 3, insulators 4, mirror holding structures 5, the outer box 6 of the case body, a partition wall 7 for dustproofing and open parts 8 for heat radiating. A filter is disposed in the open parts 8. An arrow 9 indicates an air flow due to convection current. The structure is constituted in a closed structure, wherein the resonator part is completely separated from the other constituent parts other than the resonator part using the partition wall 7, like this, and at the same time, the open parts 8, wherein each filter is disposed, are provided on the upper surface of the outer box 6, thereby enabling to stop the intrusion of the dust into the DC high-voltage charging parts. |
