| 摘要 |
PURPOSE:To enable to automatically check the function of a measuring circuit by a method wherein a reference measuring part is provided at the measuring position of the pellet wafer in a measuring device for characteristics of the pellet wafer using a probe card. CONSTITUTION:After the stage 2 in a wafer probe 5 is lowered and the pellet wafer 1 is attracted thereon, the test of characteristics of a pellet wafer 1 is performed by raising a stage 2, and contacting a measuring pin 3a to the pellet wafer 1 using a measuring instrument 7. When the number of measurement and the like of the pellet wafer 1 becomes the prescribed value, the stage 2 is moved until the measuring pin 3a comes in contact with a reference measuring part 6. The characteristics of a measuring cable 10, a probe card 3, a reference measuring part 6, a stage 2 and the measuring circuit 12 of a measuring cable 11 are measured by the measuring instrument 7. |
