| 发明名称 |
SOLID ULTRAVIOLET RAY DETECTOR AND MANUFACTURE THEREOF |
| 摘要 |
A method of preparing a UV detector of AlxGa1-xN. Metal organic chemical vapor deposition (MOCVD) is utilized to grow AlN and then AlxGa1-xN on a sapphire substrate. A photodetector structure is fabricated on the AlGaN. |
| 申请公布号 |
JPS6191977(A) |
申请公布日期 |
1986.05.10 |
| 申请号 |
JP19850225938 |
申请日期 |
1985.10.09 |
| 申请人 |
HONEYWELL INC |
发明人 |
EMU AZUIFU KAAN;RICHIYAADO JII SHIYURUTSU;RICHIYAADO EI SUKOTSUGUMAN |
| 分类号 |
G01J1/02;H01L21/205;H01L31/0304;H01L31/108;H01L31/18;H01L33/00 |
主分类号 |
G01J1/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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