SYSTEM FOR VAPOR-PHASE CRYSTAL GROWTH PROVIDED WITH VERTICAL REACTOR TUBE,申请号JP19840213767-传众专利搜索

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发明名称	SYSTEM FOR VAPOR-PHASE CRYSTAL GROWTH PROVIDED WITH VERTICAL REACTOR TUBE
摘要
申请公布号	JPS6191096(A)	申请公布日期	1986.05.09
申请号	JP19840213767	申请日期	1984.10.11
申请人	SHARP CORP	发明人	ISHIKURA TAKURO
分类号	C30B25/14;H01L21/205	主分类号	C30B25/14
代理机构		代理人
主权项
地址

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