| 摘要 |
PURPOSE:To judge on the propriety of the surface of metal, by arranging two detector sections which capture regularly reflected light and scattering reflected light from the surface with an image sensor to compare analog data corresponding to the density of an image with the upper and lower limit threshold data. CONSTITUTION:Camera heads 1a and 1b at detector sections A and B form images of an object 4 to be inspected on an image sensor 2 with an optical lens 3 as exposed to light from a light source. Here, at the detector section A the head 1a is so arranged as to admit scattering reflected light from the object 4 to be inspected while at the detector section B, the head 1b is arranged on the regular reflection optical axis of light from a light source. Then, comparators 5a and 5b compare analog data corresponding to the density of the images outputted from the sensor 2 with upper and lower limit thresholds preset to prepare a binary-coded data. AND gates 9a and 9b AND the data memorized into a mask pattern memory 8 and the binary-coded data and outputs the AND output as result data of the defect detection to be processed with a host computer C. |
