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发明名称
摘要
申请公布号
JPS6166347(U)
申请公布日期
1986.05.07
申请号
JP19840149952U
申请日期
1984.10.03
申请人
发明人
分类号
C23C14/32;C23C14/22;G03F1/00;G03F1/72;G03F1/74;H01L21/027;H01L21/30
主分类号
C23C14/32
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代理人
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