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发明名称
PROCESSING OF SEMICONDUCTOR STRUCTURE
摘要
申请公布号
JPS6189646(A)
申请公布日期
1986.05.07
申请号
JP19850104126
申请日期
1985.05.17
申请人
INTERNATL BUSINESS MACH CORP
发明人
KONSUTANSU JIYOON ARAPUSU;SUCHIIBUN EMU KANDETSUKU;EREN RUISU KATSUTONAA;AAKU ANSONII TAKAKUSU
分类号
H01L21/76;H01L21/302;H01L21/3065;H01L21/312;H01L21/762;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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