发明名称 Apparatus and method for applying coating material.
摘要 The invention described avoids all the problems of the above described prior art techniques and is characterized by holding the workpiece in an inverted position, contacting the inverted face of the workpiece with a precisely metered amount of a flowable material and rotating the workpiece in its inverted position after it has contacted the polymer to coat the workpiece with a thin, uniform layer of the flowable material. The present invention is also directed to an apparatus for coating a substrate comprising, a spindle holding the workpiece in an inverted manner so that the face of the workpiece to be coated faces downwardly towards a liquid deposit of the coating material which is supported on a nozzle beneath the spindle, which spindle may be moved to permit the inverted slice to contact the liquid deposit and means for spinning the spindle in the inverted position to spread the coating material uniformly across the face of the spinning workpiece.
申请公布号 EP0180078(A2) 申请公布日期 1986.05.07
申请号 EP19850112901 申请日期 1985.10.11
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 RINGER, FREDERICK CHARLES, JR.
分类号 H01L21/027;B05C11/00;B05C11/08;G03F7/16 主分类号 H01L21/027
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