PROCESS FOR FORMING SELF-ALIGNED DIELECTRIC ISOLATION,申请号EP19820101857-传众专利搜索

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发明名称	PROCESS FOR FORMING SELF-ALIGNED DIELECTRIC ISOLATION
摘要
申请公布号	EP0062170(A3)	申请公布日期	1986.05.07
申请号	EP19820101857	申请日期	1982.03.09
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	BEYER, KLAUS DIETRICH;LOGAN, JOSEPH SKINNER
分类号	H01L29/73;H01L21/033;H01L21/205;H01L21/265;H01L21/302;H01L21/3065;H01L21/31;H01L21/331;H01L21/76;H01L21/762;H01L29/732;(IPC1-7):H01L21/76	主分类号	H01L29/73
代理机构		代理人
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