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发明名称
WAFER TRANSPORT SYSTEM
摘要
申请公布号
EP0067705(B1)
申请公布日期
1986.05.07
申请号
EP19820303082
申请日期
1982.06.15
申请人
HITACHI, LTD.
发明人
YAGI, KUNIHIRO;USUI, HIROO;SUZUKI, MICHIO;HASHIMOTO, NORIKAZU;MATUOKA, SADAO
分类号
H01J37/317;C23C14/56;H01L21/677;H01L21/68;(IPC1-7):H01L21/68
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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