| 摘要 |
<p>PURPOSE:To heighten efficiency of removing minute particle powder and to lengthen the life of a a vacuum pump in a minute particle removing device by using an sbsorbent soaked in oil, detecting vapor pressure of the oil, and spraying the oil to prevent lowering of content fo the oil. CONSTITUTION:Exhaust gas containing UF6 is introduced by a vacuum pump 8 from an entrance 1 and collected as solid by a cold trap 2 cooled by liquid nitrogen 3, and then adsorbed and removed in an adsorption tower 4. At this time, filler of the adsorption tower is on occasion pulverized due to mutual contact, and the fine powder is sent to the minute particle removing device, and adheres to active carbon soaked in low vapor pressure oil. The gas from which fine powder is removed is discharged from an exit 9. The degree of wetting of oil immersion of active carbon 13 is estimated from detection by a pressure gauge 12, and when the degree of wetting is lowered, the oil is sprayed each time by an oil sprayer to keep the oil wet at all times.</p> |
