CENTRIFUGAL WAFER PROCESSOR,申请号EP19810900893-传众专利搜索

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发明名称	CENTRIFUGAL WAFER PROCESSOR
摘要
申请公布号	EP0047308(B1)	申请公布日期	1986.05.07
申请号	EP19810900893	申请日期	1981.02.27
申请人	SEMITOOL, INC.	发明人	THOMPSON, RAYMON F.
分类号	B08B3/04;B08B3/02;H01L21/304;H01L21/306;(IPC1-7):H01L21/68	主分类号	B08B3/04
代理机构		代理人
主权项
地址

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